Chin-Hsing Kao

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A unique, band-engineered, configuration of the charge-trapping layer in silicon-oxide-nitride-oxide-silicon (SONOS) devices is proposed for high-density Flash memory applications. In this paper, a varying Si-N ratio in modified silicon nitride is obtained by controlling reaction gas flow-rate during deposition. This generates a graded composition profile(More)
Conventional spiral inductors on silicon wafer have suffered low quality (Q) factor due to substrate loss. In this work, a technique that combines optimized shielding poly and proton implantation treatment is utilized to improve inductor Q-value. The optimized poly-silicon and proton-bombarded substrate have added 37% and 54% increment to the Q-value of(More)
A highly efficient CMOS process technique of suppressing the transmission of high-frequency noise induced by spiral inductors, ultrafast-switching MOS gates, or supply ringing through silicon substrate has been attained. The isolated n/sup +/-pocket structure formed by a promising process technique designed in this work has proven to be most effective in(More)
Different process techniques of suppressing the transmission of high-frequency noise induced by fast-switching MOS gates through silicon (Si) substrate have been examined. The isolated n/sup +/-pocket structure formed by a new process technique designed in this work has proven to be most effective in guarding vulnerable devices from remnant high-frequency(More)
A significant improvement in device performance and reliability characteristics of silicon-oxide-nitride-oxide-silicon (SONOS) Flash memory has been achieved. Superior endurance characteristic shows no sign of degradation even after 10/sup 6/ program/erase cycles and an extrapolated ten-year detection window of 1.4 V has been attained from retention(More)
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