Chih-Hsiung Shen

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To reach a high fill factor, a new CMOS-compatible thermopile was designed and fabricated. The floating membrane of the thermopile that we designed was formed by a T-shape anisotropic etching window with a minimum etching area. The design and fabrication of thermopile sensors are realized by using 1.2-μm CMOS IC technology combined with a subsequent(More)
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