Chi-Pang Chang

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The high temperature oxidation behavior of TiAlSiN and CrAlSiN coatings was studied. These coatings were deposited on silicon substrates by using a cathodic-arc deposition system with lateral rotating arc cathodes. Titanium, chromium and Al88Si12 cathodes were used for the deposition of TiAlSiN and CrAlSiN coatings. All the deposited(More)
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