Chi-Jia Tong

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An electroplating spring-bridge micro-tensile specimen is fabricated to carry out a series of monotonic tensile testing on it. Freestanding thin films were loaded by performing monotonic loading/unloading and tensiontension fatigue experiments. Loading was applied using a piezoelectric actuator with 0.1 μm resolution connected through pin hole into the test(More)
A novel design electroplating spring frame MEMS structure specimen is demonstrated here. The specimen can be fit into a specially designed microtensile apparatus which is capable of carrying out a series of tests on submicro scale freestanding thin films. Certain thin films applicable in MEMS were tested including sputtered Chrome, Nicole, Copper, Tantalum(More)
An electroplating spring-bridge micro-tensile specimen is fabricated to carry out a series of monotonic tensile testing on it. Freestanding thin films were loaded by performing monotonic loading/unloading and tensiontension fatigue experiments. Loading was applied using a piezoelectric actuator with 0.1 μm resolution connected through pin hole into the test(More)
A new technique was developed for studying the mechanical behavior of nano-scale thin metal films on substrate is presented. The test structure was designed on a novel “paddle” cantilever beam specimens with dimensions as few hundred nanometers to less than 10 nanometers. This beam is in triangle shape in order to provide uniform plane strain distribution.(More)
In this paper a technique developed for studying the anelastic behavior of nano-scale thin metal films on substrate is presented. The test microstructure was designed the triangular cantilever beam and fabricated by the standard C-MOS processes, which can improve stress distribution non-uniform problem and the thickness regime of deposited metal thin film(More)
A technique developed for studying the mechanical behavior of nano-scale thin metal films on substrate is presented. The test structure was designed on a novel “paddle” cantilever beam specimens with dimensions as few hundred nanometers to less than 10 nanometers. This beam is in triangle shape in order to provide uniform plane strain distribution. Standard(More)
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