Chi-Jia Tong

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A new technique was developed for studying the mechanical behavior of nano-scale thin metal films on substrate is presented. The test structure was designed on a novel " paddle " cantilever beam specimens with dimensions as few hundred nanometers to less than 10 nanometers. This beam is in triangle shape in order to provide uniform plane strain(More)
An electroplating spring-bridge micro-tensile specimen is fabricated to carry out a series of monotonic tensile testing on it. Freestanding thin films were loaded by performing monotonic loading/unloading and tension-tension fatigue experiments. Loading was applied using a piezoelectric actuator with 0.1 μm resolution connected through pin hole into the(More)
A novel design electroplating spring frame MEMS structure specimen is demonstrated here. The specimen can be fit into a specially designed microtensile apparatus which is capable of carrying out a series of tests on sub-micro scale freestanding thin films. Certain thin films applicable in MEMS were tested including sputtered Chrome, Nicole, Copper, Tantalum(More)
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