Ch. Linder

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Two resonators with polysilicon microbeams as oscillating elements are presented. One oscillator is capacitively excitated and detected, the other one is electro-thermally activated and measured by means of piezoresistors. Sacrificial layer technology with different types of sacrificial dioxide (thermal and CVD) is applied for the fabrication of the(More)
This paper presents a comparative study of surface micromachined structures fabricated in three different materials, using torsional micromirrors as test vehicle. The devices are realized in single-crystal silicon, polycrystalline silicon and aluminum. Mechanical properties such as internal strains, sticking phenomena, yield strains and endurance test(More)
The innermost layer (b-physics layer) of the ATLAS Pixel Detector will consist of modules based on MCM-D technology. Such a module consists of a sensor tile with an active area of 16.4 mm x 60.4 mm, 16 read out ICs, each serving 24 x 160 pixel unit cells, a module controller chip (MCC), an optical transceiver and the local signal interconnection and power(More)
Le tableau synoptique publi6 par l'un de nous [1] t) n'indiquait que la pr6sence ou l'absence au lac de Bret des organismes pendant les ann&s I9O2/O3, I943 et I931. I1 nous a paru int&essant d'&udier aussi leur distribution mensuelle ct annuelle aux diff&ents niveaux afin d'en tirer des comparaisons et des relations 6ventuelles avec les conditions(More)
Silicon pixel sensors developed by the ATLAS collaboration to meet LHC requirements and to withstand hadronic irradiation to uences of up to 1015 neq=cm 2 have been evaluated using a test beam facility at CERN providing a magnetic eld. The Lorentz angle was measured and found to alter from 9:0 before irradiation, when the detectors operated at 150 V bias at(More)
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