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Reported is a surface-micromachined piezoresistive composite sensor, with both pressure sensor and accelerometer integrated in a 1.6mm×1.6mm chip for low-cost automobile tire-pressure monitor system (TPMS) application [1]. The two sensors are fabricated with compatible surface-micromachining process. Using a LIGA like process, a Cu thick-layer is(More)
Reported is an lateral-mode resonant cantilever sensor that features a much depressed liquid drag force, thereby, achieving a much higher quality factor of 249 in water and higher specific mass sensitivity in liquids, compared with traditional out-of-plane resonant cantilevers. With 8.8Hz/pg sensitivity calibrated by specific binding streptavidin-labled(More)
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