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The real-time atomic force microscope for biological sample is a challenging research field. We have demonstrated a real-time atomic force microscope by implementing a mechanical resonator type scanner called by "microscanner" The microscanner was designed to have a resonance frequency in the range of 5-10 kHz and an amplitude of 1-3 microm. The resonant(More)
Improving the throughput of atomic force microscope (AFM) lithography is an important success factor for employing it in nanolithography applications. The conventional motion of the AFM tube scanner is usually driven by triangular-shaped signals, but it is limited in speed due to mechanical instability of the scanner at the turning points. Here, we show(More)
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