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The formation of ions following the termination of power in a pulsed glow discharge ion source is investigated. The populations of ionized species containing sputtered atoms M(+), M 2 (1) :, and MAr(+) are observed to maximize after the termination of discharge power. Collisions involving sputtered atoms and metastable argon atoms, Penning and associative(More)
The glow discharge ionization source operated in the pulsed, or modulated, power mode affords a number of distinct advantages over its steady-state counterpart. It is well-known that pulsed plasma operation permits the application of higher instantaneous powers by allowing time for the sample to cool. This minimizes sample overheating while effecting higher(More)
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