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This paper presents the characteristics of silicon thin film thermistors. The polycrystalline silicon and amorphous silicon films were deposited by low pressure chemical vapor deposition (LPCVD) to serve as thermistors. We have studied the effects of temperature on thermistor with various boron implantation doses from 1.0times10<sup>16</sup> to(More)
This innovative pH-ISFET sensor used nanocrystalline-AlN thin film as ion-sensitive membrane which prepared by reactive gas-timing r.f. magnetron sputtering without heating substrate and post annealing. The technique of gas-timing r.f. magnetron sputtering purposed by us, the feeding gas is on-off controlled periodically in such a way that the deposited(More)
ImmunoFET (IMFET) biosensor is a simple platform for the detection of biotinylated products of polymerase chain reaction (PCR). Construction of the IMFET biosensor started with adsorption of 1.5 mg/mL of protein A (PA) onto the insulated gate surface of ISFET for 90 min. Next, the immobilized 1/500 dilution of anti-biotin antibody was adsorbed onto the PA(More)
This paper presents a magnetotransistor for detecting magnetic field in vertical and lateral directions (B<sub>Y</sub> and B<sub>Z</sub>) by relying on the difference between base and collector currents (&#x0394;I<sub>CB</sub>). It was designed and fabricated using CMOS fabrication technology. The device structure consisted of one emitter, 4 collectors and(More)
This paper presents improve sensitivity of pnp-magnetotransistor for detect vertical magnetic field response. The device structure consisted of one emitter, four collectors and four bases. The four collectors are separate to form four terminals. The same is true for the four bases. The experiment showed that, at 2 and 4mA of biasing current, magnetic field(More)