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Despite significant advances in surface micromachining technology, stiction remains a key problem, severely limiting the realization Ž. and reliability of many micro-electro-mechanical systems MEMS devices. In this article, we focus on self-assembled monolayers as release and anti-stiction coatings for MEMS. Their formation mechanism, the microstructure(More)
The microscopic length scale and high surface-to-volume ratio, characteristic of microelectro-mechanical systems (MEMS), dictate that surface properties are of paramount importance. This review deals with the effects of surface chemical treatments on tribological properties (adhesion, friction, and wear) of MEMS devices. After a brief review of materials(More)
The early stages of epitaxial graphene layer growth on the Si-terminated 6H-SiC (0001) are investigated by Auger electron spectroscopy (AES) and depolarized Raman spectroscopy. The selection of the depolarized component of the scattered light results in a significant increase in the C-C bond signal over the second order SiC Raman signal, which allows us to(More)
The selective detection of a specific target molecule in a complex environment containing potential contaminants presents a significant challenge in chemical sensor development. Utilizing phage display techniques against trinitrotoluene (TNT) and dinitrotoluene (DNT) targets, peptide receptors have previously been identified with selective binding(More)
Semiconductor heterostructures are the fundamental platform for many important device applications such as lasers, light-emitting diodes, solar cells, and high-electron-mobility transistors. Analogous to traditional heterostructures, layered transition metal dichalcogenide heterostructures can be designed and built by assembling individual single layers(More)
The precursor formamide 1 was employed instead of the monomer 2 because isocyanides are relatively unstable in air at room temperature. [19] a) [20] Molecular modeling shows that (in common with the phenyl benzo-ate compounds previously described [17]) an angle exists between the planar phenoxy and TTF ring systems. [21] The oxidation of the polymer was(More)
Strain state of ultrathin InAs-on-insulator layers obtained from an epitaxial transfer process is studied. The as-grown InAs epilayer ͑10–20 nm thick͒ on the GaSb/AlGaSb source wafer has the expected ϳ0.62% tensile strain. The strain is found to fully release during the epitaxial transfer of the InAs layer onto a Si/ SiO 2 substrate. In order to engineer(More)
Using an ultrathin (∼ 15 nm in thickness) molybdenum oxide (MoOx, x < 3) layer as a transparent hole selective contact to n-type silicon, we demonstrate a room-temperature processed oxide/silicon solar cell with a power conversion efficiency of 14.3%. While MoOx is commonly considered to be a semiconductor with a band gap of 3.3 eV, from X-ray photoelectron(More)
Microsupercapacitors are attractive energy storage devices for integration with autonomous microsensor networks due to their high-power capabilities and robust cycle lifetimes. Here, we demonstrate porous silicon nanowires synthesized via a lithography compatible low-temperature wet etch and encapsulated in an ultrathin graphitic carbon sheath, as(More)
A silver galvanic displacement process on commercial aluminum foil has been carried out to produce cost-effective SERS substrates. The process is based on an extremely simple redox process where aluminum is oxidized while silver ions are reduced, yielding a final silver dendritic structure that offers a large surface area-to-volume ratio. XPS measurements(More)