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The revolutionary and truly 3-dimensional 25F/sup 2/ SRAM technology with the smallest S/sup 3/ ( stacked single-crystal Si) cell, 0.16um/sup 2/, and SSTFT (atacked single-crystal thin film…
- Soon-Moon Jung, Jaehoon Jang, +8 authors K. Kim
- Digest of Technical Papers. Symposium on VLSI…
- 15 June 2004
The smallest 25F/sup 2/ SRAM cell size of 0.16um/sup 2/ is realized by S/sup 3/ cell technology and SSTFT with 193nm ArF lithography process. The stacked single-crystal thin film is developed and… Expand