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An ontology is a crucial factor for the success of the Semantic Web and other knowledge-based systems in terms of share and reuse of domain knowledge. However, there are a few concrete ontologies within actual knowledge domains including learning domains. In this paper, we develop an ontology which is an explicit formal specification of concepts and(More)
A deeper understanding of imaging behavior is needed with the widespread adoption of optical proximity correction in advanced lithography processes. To gain insight into the printing behavior of different mask pattern configurations, we derive edge-based and vertex-based image models by combining concepts contained in the geometrical theory of diffraction(More)
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