Bikram Baidya

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Surface micromachined structures are composed of atomic elements like anchors, beams and fingers, which can be further grouped into components like springs, comb drives and plates. Automatic recognition of these elements and components is crucial for a structured design methodology in MEMS (Microelectromechanical system). As MEMS design tends to be(More)
Chip-based microfluidic separation systems often use serpentine channels to achieve long separation lengths in minimal area. Such designs suffer from the ‘racetrack’ effect due to the bends in the microchannel. In addition, the skew produced by a bend cannot be undone by an equal and opposite bend due to non-axial diffusion occurring in the inter-turn(More)
Microelectromechanical systems (MEMS) integrating multidomain sensors and actuators with conventional microelectronic batch fabrication processes are becoming increasingly complex. In order to design systems with large numbers of multi-domain components, we need to use a hierarchical structured design approach, with design at the schematic level instead of(More)
In this paper, we describe an automatic technique for meshing multilayer CMOS micromachined structures for Finite Element Analysis (FEA) from device layout. The technique is based on a 3D canonical representation of the different CMOS layers and feature recognition of plate masses, springs, beams and comb drives within the surface micromachined MEMS device.(More)
Among double patterning techniques, Self-aligned double patterning (SADP) has the advantage of good mask overlay control, which has made SADP a popular double patterning method for sub-32nm technology nodes. However, SADP process places several limitations on design flexibility. This work exploits an alternative post routing approach that has the(More)
The advent of CMOS micromachining has introduced new design rules for fabrication of integrated CMOS-MEMS devices. This paper presents a context dependent DRC algorithm to handle the issues related to pre-fabrication verification of such layouts. In addition, problems related to density control, specific to CMOS-MEMS designs, are discussed. An automatic(More)
As design of integrated microelectromechanical systems (MEMS) mature, there is an increasing need for verification tools for such mixed-domain layouts. This requires a mixed-domain layout-versus-schematic tool capable of extracting an integrated schematic from the mixed-domain layout and verifying it against the design schematic. This paper reports on a(More)