Bernhard Haindl

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—The maximum principle is the most important property of solutions to diffusion equations. Violation of the maximum principle by the applied discretization scheme is the cause for severe numerical instabilities: the emergence of negative concentrations and, in the nonlinear case, the deterioration of the convergence of the Newton iteration. We compare(More)
— For wafer sizes in state-of-the-art semiconductor manufacturing ranging up to 300 mm, the uniformity of processes across the wafer becomes a very important issue. We present a fully three-dimensional model for the feature scale simulation of continuum transport and reaction determined high-pressure chemical vapor deposition processes suitable for the(More)
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