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In this paper we investigate the impact of bake plate temperature variability throughout the entire bake trajectory on resulting critical dimension. For a poorly-controlled bake plate, it is found that the correlation between the temperature profile and CD distribution is high throughout the entire bake cycle, including the steady state sector. However, for(More)
We present a new concept for online multiobjective optimization and its application to the optimization of the operating point assignment for a doubly-fed linear motor. This problem leads to a time-dependent multiobjective optimization problem. In contrast to classical optimization where the aim is to find the (global) minimum of a single function, we want(More)
Self-optimizing mechatronic systems have the ability to adjust their goals and behavior according to changes of the environment or system by means of complex real-time coordination and reconfig-uration in the underlying software and hardware. In this paper we sketch a generic software architecture for mechatronic systems with self-optimization and outline(More)
A delta-sigma modulator converts an analog input signal into a high-frequency stream of single bits with out-off band noise. A high-resolution signal is extracted from the bit-stream with an appropriate low pass filter. The paper emphasizes on the utilization of SincK-filters as low pass filter and proposes a sampling method that is synchronized with the(More)
Six normal weight subjects without any heredity of diabetes (group 1), 3 obese subjects with normal (group 2) and 9 with pathological carbohydrate tolerance (group 3) were characterized by a 2-h glucose infusion test. Adipose tissue fragments were obtained from the abdominal wall by surgical biopsy under intracutaneous anesthesia. Adipocytes were isolated(More)
We have studied the interrelationship of total body fat mass, carbohydrate tolerance and IRI response in 17 non-obese and obese subjects, who were suspected of having early diabetes. We carried out an i.v. glucose infusion test consisting of a priming injection of 0.33 g/kg followed by constant glucose infusion of 12 mg/kg/min in all persons. Total body fat(More)