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In this paper we investigate the impact of bake plate temperature variability throughout the entire bake trajectory on resulting critical dimension. For a poorly-controlled bake plate, it is found that the correlation between the temperature profile and CD distribution is high throughout the entire bake cycle, including the steady state sector. However, for(More)
We present a new concept for online multiobjective optimization which has been applied to a real–world application, that is the optimization of the assignment of an operating point to a doubly fed linear motor. This problem leads to a time–dependent multiobjective optimization problem. In contrast to classical optimization where the aim is to find the(More)
Self-optimizing mechatronic systems have the ability to adjust their goals and behavior according to changes of the environment or system by means of complex real-time coordination and reconfig-uration in the underlying software and hardware. In this paper we sketch a generic software architecture for mechatronic systems with self-optimization and outline(More)
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