Learn More
A major problem for applying self-test techniques to MEMS is the multi-domain nature of the sensing parts that require special test equipment for stimuli generation. In this work we describe, for three different types of MEMS that work in different energy domains, how the required non-electrical test stimuli can be induced on-chip by means of electrical(More)
for microelectromechanical systems (MEMS) emerge, research efforts shift toward the design of systems of increasing complexity. Focusing on higher-level design issues is being made possible by the development of hierarchical cell design methodologies, libraries of characterized MEMS elements, mixed-technology simulators, layout synthesis tools, and design(More)
<i>This paper illustrates an approach to design and validation of heterogeneous systems. The emphasis is placed on devices which incorporate MEMS parts in either a single mixed-technology (CMOS</i> + <i>micromachining) SOC device, or alternatively as a hybrid system with the MEMS part in a separate chip. The design flow is general, and it is illustrated for(More)
This paper presents the applicability of a cosimulation methodology based on an object-oriented simulation environment, to multi-domain and multi-language systems design. This methodology starts with a system model given as a netlist of heterogeneous components and enables the systematic generation of simulation models for multi-domain and multi-language(More)
Infrastructures to provide access to custom integrated hardware manufacturing facilities are important because they allow Students and Researchers to access professional facilities at a reasonable cost, and they allow Companies to access small volume production, otherwise difficult to obtain directly from manufacturers. This paper is reviewing the most(More)
We present in this paper a novel tactile fingerprint sensor composed by a single row of microbeams realized by the way of front side bulk micromachining from a standard CMOS circuit. When the user passes his finger on the sensor, the ridges and the valleys that compose the fingerprint induce deflections in the different microbeams. Using a piezoresistive(More)