Learn More
The two steps RTP program for 32nm NiPt silicide formation process has been evaluated to improve source-drain resistance (Rsd), resistance uniformity and device leakage reduction behavior. A lower RTP-1 process has been investigated over the Nickel rich silicide phase formation and physical defect reduction. A higher millisecond anneal (MSA) RTP-2 has been(More)
In this paper we present an atypical method for measuring respiration volume. We infer heart rate variability (HRV) from an electrocardiogram (ECG) and present results from a pilot study of 6 participants to validate measuring respiration volume from HRV in comparison to the Cosmed K4b(2). We show a qualitative correlation and trend between the known(More)
Three photon interaction processes, namely, the photoelectric effect, Compton effect, and pair production, can occur when materials with high atomic numbers are irradiated by the high- and low-energy bremsstrahlung photons from a linear accelerator. A dose enhancement, due to the photoelectric effect and pair production, near targets with platinum implants(More)
  • 1