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This paper investigates the dynamic response of a class of electrostatically driven microelectromechanical (MEM) oscillators. The particular systems of interest are those which feature parametric excitation that arises from forces produced by fluctuating voltages applied across comb drives. These systems are known to exhibit a wide range of behaviors, some… (More)

A variety of microelectromechanical (MEM) oscillators is governed by a version of the Mathieu equation that harbors both linear and cubic nonlinear time-varying stiffness terms. In this paper, chaotic behavior is predicted and shown to occur in this class of MEM device. Specifically, by using Melnikov’s method, an inequality that describes the region of… (More)

- Georg Schitter, Karl Johan Åström, Barry E. DeMartini, Philipp J. Thurner, Kimberly L. Turner, Paul K. Hansma
- IEEE Trans. Contr. Sys. Techn.
- 2007

A new mechanical scanner design for a high-speed atomic force microscope (AFM) is presented and discussed in terms of modeling and control. The positioning range of this scanner is 13 m in the and -directions and 4.3 m in the vertical direction. The lowest resonance frequency of this scanner is above 22 kHz. This paper is focused on the vertical direction… (More)

Due to the position-dependent nature of electrostatic forces, many microelectromechanical (MEM) oscillators inherently feature parametric excitation. This work considers the nonlinear response of one such oscillator, which is electrostatically actuated via non-interdigitated comb drives. Unlike other parametricallyexcited systems, which feature only linear… (More)

Microelectromechanical oscillators utilizing noninterdigitated combdrive actuators have the ability to be parametrically excited, which leads to distinct advantages over harmonically driven oscillators. Theory predicts that this type of actuator, when dc voltage is applied, can also be used for tuning the effective linear and nonlinear stiffnesses of an… (More)

- Barry E. DeMartini, Jeffrey F. Rhoads, Mark A. Zielke, Kyle G. Owen, Steven W. Shaw, Kimberly L. Turner
- 2008

for the detection and identification of multiple analytes Barry E. DeMartini, Jeffrey F. Rhoads, Mark A. Zielke, Kyle G. Owen, Steven W. Shaw, and Kimberly L. Turner Department of Mechanical and Environmental Engineering, University of California-Santa Barbara, Santa Barbara, California 93106, USA School of Mechanical Engineering and Birck Nanotechnology… (More)

This paper summarizes the results of a joint analytical and experimental investigation of a new class of resonant microsensors. The key feature f these devices is that they exploit vibration localization in a set of functionalized, frequency mistuned microbeam resonators, each coupled to a ommon shuttle mass, to facilitate the detection of multiple analytes… (More)

A model for the dynamics of an emerging class of electrostatically driven microelectromechanical oscillators, parametrically excited MEM oscillators, has been developed. The equation of motion for these devices is a nonlinear version of the Mathieu Equation, which gives rise to rich dynamics. A standard perturbation analysis, averaging, has been adopted to… (More)

This work details the preliminary development and testing of a novel, single input – single output (SISO) resonant microsensor, which exploits vibration localization in a coupled-oscillator architecture to allow for the detection of multiple analytes with a single platform. The work includes a brief description of a preliminary sensor design and its… (More)

- Barry Ernest DeMartini, Jeff Moehlis, +28 authors Steve W. Shaw
- 2008

Development of Nonlinear and Coupled Microelecromechanical Oscillators for Sensing Applications Barry Ernest DeMartini Microelectromechanical systems (MEMS) have gained a great deal of interest over the years due to their small size, low power consumption, ability to be batch fabricated, and ability to be integrated with on-chip electronics. These benefits,… (More)