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This paper presents the fabrication process, characterization results and basic functionality of silicon microneedles array with biodegradable tips. In order to avoid the main problems related to silicon microneedles: broking of the top part of the needles inside the skin, a simple solution can be fabrication of microneedles array with biodegradable tips.(More)
A bulk micromachined three-dimensional electrostatic microactuator, used for a hard disk drive dual-stage positioning system, was developed using deep RIE and wafer bonding technologies. The actuators, arranged as vertical comb drives, thereby enhance the electrostatic driving force. By using the proper flexures, the secondary stage actuator drives the R/W(More)
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