Béla Szentpáli

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A novel MEMS thermopile structure is presented, in which the thermopairs act as dipole antennas. The induced current heats the hot point of the thermopairs. The thermoelectric output voltage is proportional to the absorbed radiation power. The antenna-like feature of the device is demonstrated by the dependence of the sensitivity on the polarization. 5.58(More)
The miniature thermal resistors are comprehensively applied as thermistors or bolometers. Due to the dynamic development of the micromachining technologies became possible their mass-production with the precision and reproducibility of the microelectronics. These techniques result in typical lateral dimensions in the 1....100 μm range and thicknesses about(More)
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