Asao Kaneko

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A 16-channel 200GHz arrayed-waveguide grating (AWG) (de)-multiplexer is demonstrated experimentally by utilizing Si 3 N 4 buried optical waveguides, which have 50nm-thick Si 3 N 4 cores and a 15μm-thick SiO 2 cladding. The structure with an ultra-thin core layer helps to reduce the scattering due to the sidewall roughness and consequently shows very low(More)
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