Arthur S. Francomacaro

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We report on the design and fabrication of surface mi-cromachined microelectromechanical structures (MEMS) in an ultra thin silicon (UTSi) on sapphire CMOS process [Pere-grine Semiconductor (PE) Silicon on Sapphire (SOS) pro-cess] [1]. This is the first demonstration of surface micro-machined MEMS structures in a CMOS process fabricated on a sapphire(More)
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