Arthur S. Francomacaro

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We report on the design and fabrication of surface micromachined microelectromechanical structures (MEMS) in an ultra thin silicon (UTSi) on sapphire CMOS process [Peregrine Semiconductor (PE) Silicon on Sapphire (SOS) process] [1]. This is the first demonstration of surface micromachined MEMS structures in a CMOS process fabricated on a sapphire substrate.
lectronic Services at APL range from an array of engineering, circuit, and packaging design capabilities, through hardware fabrication and assembly, to final inspection and test of a completed product. These products range from the very small to the very large, from space to submarine applications, and everything in between. The Laboratory’s in-house(More)
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