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This paper presents analytic modeling, simulations, and experimental validation of RF MEMS switch actuation using tailored voltage waveforms. This actuation scheme can eliminate impact bouncing during switch activation and can significantly reduce harmonic oscillations during switch release.
A new test device for measuring strength of brittle microbeams was recently proposed. This test device requires no measurement of applied forces or of deformation. In this work, the theoretical analysis that explains how the strength of microbeams may be deduced from the length of the remaining ligament of broken beams is presented