Arantxa Uranga

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The development and in vivo test of a fully integrated differential CMOS amplifier, implemented with standard 0.7-microm CMOS technology (one poly, two metals, self aligned twin-well CMOS process) intended to record extracellular neural signals is described. In order to minimize the flicker noise generated by the CMOS circuitry, a chopper technique has been(More)
The development of an integrated amplifier intended to record electrical signals from extracellular peripheral nerves, using cuff electrodes, is presented. In order to minimize the flicker noise generated by the CMOS circuitry, a chopper full differential amplifier is implemented. The amplifier has a gain of 74 dB, a bandwidth of 3 kHz and a power(More)
In this work we study the feasibility to obtain the smallest CMOS-NEMS resonator using a sub-100 nm CMOS technology. The NEMS resonators are defined in a top-down approach using the available layers of the 65 nm CMOS technology from ST Microelectronics. A combination of dry and wet etching is developed in order to release the NEMS in an in-house post-CMOS(More)
Shadow masking (also known as nanostencil lithography, SL) is a well known technique to fabricate patterns on a surface. It is a versatile method that can be used in a variety of applications. There has been recently a strong interest regarding the use of shadow masks, mostly related to combinatorial materials science, organic based device fabrication, as(More)
This work demonstrates the feasibility to obtain copper nanoelectromechanical (NEMS) relays using a commercial complementary metal oxide semiconductor (CMOS) technology (ST 65 nm) following an intra CMOS-MEMS approach. We report experimental demonstration of contact-mode nano-electromechanical switches obtaining low operating voltage (5.5 V), good I ON /I(More)
Micro and nano electromechanical resonators have been widely used as single or multiple-mass detection sensors. Smaller devices with higher resonance frequencies and lower masses offer higher mass responsivities but suffer from lower frequency stability. Synchronization phenomena in multiple MEMS resonators have become an important issue because they allow(More)
A top-down clamped-clamped beam integrated in a CMOS technology with a cross section of 500 nm × 280 nm has been electrostatic actuated and sensed using two different transduction methods: capacitive and piezoresistive. The resonator made from a single polysilicon layer has a fundamental in-plane resonance at 27 MHz. Piezoresistive transduction avoids the(More)