Arantxa Uranga

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The development and in vivo test of a fully integrated differential CMOS amplifier, implemented with standard 0.7-microm CMOS technology (one poly, two metals, self aligned twin-well CMOS process) intended to record extracellular neural signals is described. In order to minimize the flicker noise generated by the CMOS circuitry, a chopper technique has been(More)
In this work we study the feasibility to obtain the smallest CMOS-NEMS resonator using a sub-100 nm CMOS technology. The NEMS resonators are defined in a top-down approach using the available layers of the 65 nm CMOS technology from ST Microelectronics. A combination of dry and wet etching is developed in order to release the NEMS in an in-house post-CMOS(More)
Francesc Pérez-Murano, Julien Arcamone, Marc Sansa, Jaume Verd, Arantxa Uranga, Gabriel Abadal, Núria Barniol, Marc van den Boogaart and Juergen Brugger 1 Instituto de Microelectronica de Barcelona CNM-IMB (CSIC), Campus UAB, 08193 Bellaterra (Barcelona), Spain. 2 Dept.Electronics Engineering, Universitat Autonoma de Barcelona, ETSE-UAB, 08193-Bellaterra(More)
Micro and nano electromechanical resonators have been widely used as single or multiple-mass detection sensors. Smaller devices with higher resonance frequencies and lower masses offer higher mass responsivities but suffer from lower frequency stability. Synchronization phenomena in multiple MEMS resonators have become an important issue because they allow(More)