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This paper presents a comparison of three algorithm types (Bayesian Networks, Random Forest and Linear Regression) for Predictive Maintenance on an implanter system in semiconductor manufacturing. The comparison studies are executed using a Virtual Equipment which serves as a testing environment for prediction algorithms prior to their implementation in a(More)
This paper presents a Virtual Equipment which serves as a testing environment for evaluating Virtual Metrology (VM) algorithms prior to their implementation into semiconductor fab structures. The Virtual Equipment merges statistical simulation with physical simulation to generate test data sets for various common and uncommon states of the processing(More)
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