Andreas Kyek

We don’t have enough information about this author to calculate their statistics. If you think this is an error let us know.
Learn More
I. Introduction In a fab, a plant that manufactures semiconductor devices, starting with an uniformly doped bare silicon wafer, the fabrication of integrated circuits needs hundreds of sequential process steps which can be assorted into 7 main process areas: lithography, etching, deposition, chemical mechanical planarization, oxidation, ion implanta-tion(More)
  • 1