Aliza Aini Md Ralib

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Energy harvesting devices, capable of converting wasted ambient energy to electrical power are rapidly gaining popularity as a source of green and renewable energy. This work presents the design and simulation of MEMS based piezoelectric cantilever beam which can both harvest energy as well as monitor critical vibration frequencies in power plant gas(More)
This paper addresses the investigation of acoustic wavelength effects on silicon compatible SAW resonator based on Al doped ZnO thin film. Three different resonators at acoustic wavelength of 3.2, 3.6 and 4.8 µm were simulated using COMSOL Multiphysics. The device is fabricated using post CMOS approach namely deposition of 3.78 µm thickness of Al doped Zinc(More)
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