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—In this paper, we design feedback controllers for lateral and transversal axes of an atomic force microscope (AFM) piezoelectric tube scanner. The controllers are constrained to keep the standard deviation of the measurement noise fed back to the displacement output around 0.13 nm. It is shown that the incorporation of appropriate inner loops provides(More)
Tracking of triangular or sawtooth waveforms is a major difficulty for achieving high-speed operation in many scanning applications such as scanning probe microscopy. Such non-smooth waveforms contain high order harmonics of the scan frequency that can excite mechanical resonant modes of the positioning system, limiting the scan range and bandwidth. Hence,(More)
  • Y Zhu, A Bazaei, S O R Moheimani, M R Yuce
  • 2010
—This letter describes the design of a micromachined nanopositioner with thermal actuation and sensing capabilities in a single chip. The positioner has a dynamic range of 14.4 µm, and the sensor drift is 8.9 nm over 2000 s with a differential sensing scheme. The on-chip displacement sensing enables a feedback control capability. A proportional–integral(More)