Alexia Missoffe

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A very simple displacement sensor is presented with nanometric resolution over centimetric travel range. The compact system is composed of a laser-diode module and a photodiode array leading to a non-contact sensor. With a corner cube configuration, it is not sensitive to most of main mechanical defects of the mobile platform. The use of an optical fiber(More)
The accurate modelling of damping is essential to capture the dynamic behaviour of a MEMS device. Our interest lies in squeeze-film damping which models the behaviour of a fluid in small gaps between a fixed surface and a structure moving perpendicular to this surface (Fig.1). The lateral dimensions of the surfaces are large compared to the gap and the(More)
We present an integrated optical waveguide interferometer highly compact and easy-to-use. Metrological study is focused on the resolution and the noise level of the sensor. A standard Allan deviation lower than 50 pm has been observed in standard environment. Power spectral densities up to 150 fm. Hz<sup>-1/2</sup> at 10 kHz are achieved. The flicker level(More)
This paper presents a reduced-order model for the Reynolds equation for deformable structure and large displacements. It is based on the model established in [11] which is piece-wise linearized using two different methods. The advantages and drawbacks of each method are pointed out. The pull-in time of a microswitch is determined and compared to(More)
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