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  • Carl Johnzen, Philippe Vialletelle, Stéphane Dauzère-Pérès, Claude Yugma, Alexandre Derreumaux
  • Computer Science
  • Winter Simulation Conference
  • 2008 (First Publication: 7 December 2008)
  • A qualification management software that proposes recipe qualifications on tools in toolsets for semiconductor manufacturing has been developed. The qualification proposals are based on flexibilityContinue Reading