Alexandra Koumela

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This paper reports on ultra-scaled single-crystal Si NEMS resonators (25-40 nm thick) operating in the 10-100 MHz frequency range. Their first monolithic integration at the front-end level with CMOS enables to extract the signal from background leading to possible implementation of direct/homodyne measurement, for high sensitivity sensing applications and(More)
Measurements of the gauge factor of suspended, top-down silicon nanowires are presented. The nanowires are fabricated with a CMOS compatible process and with doping concentrations ranging from 2 × 10(20) down to 5 × 10(17) cm(-3). The extracted gauge factors are compared with results on identical non-suspended nanowires and with state-of-the-art results. An(More)
High frequency Silicon NanoWire Resonators (SNWR) have been fabricated and their performances for time reference applications have been assessed. The SNWR have been designed to operate at different frequencies going from 55 MHz up to 300 MHz with quality factors higher than 2000 at room temperature under high vacuum. The measured temperature coefficient of(More)
The electro-mechanical characterization of MEMS diaphragms for acoustic applications is introduced in this paper. The samples under test are fabricated with the 0.35 AMS CMOS process with front-side surface etching post-process. The goals of the experimental activities are to verify the performances and repeatability of fabrication process and to identify(More)
We report here the first realization of top-down silicon nanowires (SiNW) transduced by both junction-less field-effect transistor (FET) and the piezoresistive (PZR) effect. The suspended SiNWs are among the smallest top-down SiNWs reported to date, featuring widths down to ~20 nm. This has been achieved thanks to a 200 mm-wafer-scale, VLSI process fully(More)
This paper reports the conception, the fabrication and the electrical testing of an overdamped silicon accelerometer dedicated to vibrating environments. Squeeze-film damping effects are implemented to drastically reduce the mechanical component bandwidth while keeping a satisfactory resolution. Mechanical filtering of vibrations above 3 Hz is expected to(More)
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