Albert Hasper

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A model is presented to calculate the step coverage of blanket tungsten low pressure chemical vapor deposition (W-LPCVD) from tungsten hexafluoride (WF6). The model can calculate tungsten growth in trenches and circular contact holes, in the case of the WF6 reduction by H2, Sill4, or both. The step coverage model predictions have been verified(More)
The N-terminus of the H(+)-ATPase from Saccharomyces cerevisiae contains a serine-rich cluster of 11 serine residues in the first 17 amino acids, including a stretch of eight consecutive serine residues. This cluster is conserved in the weakly expressed PMA2 gene from the same organism, but it is not present in PMA genes from other organisms suggesting that(More)
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