Akifumi Fujishiro

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Very fine needle-electrode arrays potentially offer both low invasiveness and high spatial resolution of electrophysiological neuronal recordings in vivo. Herein we report the penetrating and recording capabilities of silicon-growth-based three-dimensional microscale-diameter needle-electrodes arrays. The fabricated needles exhibit a circular-cone shape(More)
We report a 8–12-µm-diameter 210-µm-length penetrating silicon probe array assembled by vapor-liquid-solid (VLS) growth, for use in multi-site recordings of neuron spikes in a brain cortex. A 3-µm-diameter silicon probe-tip metalized with platinum (Pt)-black by the electroplating, exhibits low enough probe impedance of 103(More)
MEMS-based penetrating micro-scale probe electrodes have been used in numerous electrophysiological measurements. However, it is necessary to quantitatively study probe-induced stress on the tissue/neurons and the damage during the probe penetration. Here we propose a vertically-aligned electrical recording neuroprobe array each with the force detection(More)
Herein, we fabricate a flexible microelectronic system using a conventional silicon (Si) integrated circuit process. The fabricated device is a -thick film flexible 7 × 8 (56 ch) switch-matrix microelectrode array, which can be used to record the electrical activity from numerous three-dimensional biological tissues. The embedded Si-nMOSFETs/(111) in(More)
This paper presents a very thin silicon dioxide microtube electrode array, which has sub tenmicrometers in inner diameter, as a neural interface device with high signal-to-noise ratio and low invasiveness. The device was realized by using out-of-plane silicon dioxide microtube arrays fabricated from vapor-liquid-solid growth and microfabrication techniques.(More)
We report an electrode device with a low impedance and high charge injecting characteristics for a powerful application to micro/nano-scale electrophysiological measurements of neuron/cells. Due to the small effective electrode area, conventional microelectrodes exhibit high interfacial electrode impedance (~10 MΩ at 1 kHz) and low charge injection(More)
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