Ahmed Amine Rekik

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— In this paper, a behavioral model that includes the influence of etching defects on the sensitivity of MEMS convective accelerometers is presented. Starting from an existing behavioral model, new physically-based expressions have been derived to introduce etching defects in the simulation of thermal conduction in the sensor. In addition, a semi-empirical(More)
In this paper, an alternative test method for MEMS convective accelerometers is presented. It is first demonstrated that device sensitivity can be determined without the use of physical test stimuli by simple electrical measurements. Using a previously developed behavioral model that allows efficient Monte-Carlo simulations, we have established a good(More)
This paper presents a behavioral model that can be used to improve the manufacturability of systems based on MEMS convective sensors. This model permits to handle faults related to process scattering, taking into account not only the electrical and lateral geometrical parameters but also the influence of the cavity depth. Moreover correlations between(More)
This paper reports efficiency modeling using 3D FEM simulation of a convective accelerometer obtained by FSBM of a die fabricated using standard CMOS technology. In such sensors, best sensitivity is obtained by placing temperature detectors where air temperature is the most sensitive to acceleration. This will obviously depends on 3D effects. In a previous(More)
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