Abhijeet V. Chavan

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—This paper reports two multitransducer vacuum-sealed capacitive barometric pressure sensors, one using single-lead and the other using multiple-leads to transfer the electrical signal out of the vacuum-sealed reference cavity. The first device operates with a resolution of 37 mtorr over a pressure range from 600 to 800 torr. The sensitivity is 27 fF/torr(More)
—This paper reports a mixed-voltage mixed-signal chip for interfacing multiple capacitive transducers to embedded processors in integrated microsystems. A programmable switched-capacitor readout circuit accommodates capacitive sensors from 16 fF to 40 pF and allows self-test and online calibration. The 20 mm 2 chip has a sensitivity of 1.25 mV/fF and is(More)
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