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Interaction between metamaterial elements and intersubband transitions in GaAs/AlGaAs quantum wells is observed in the mid-infrared. Transmission measurements were performed through metamaterial arrays, each having a different resonance frequency.
We experimentally demonstrate that the resonance of a thermal-infrared metamaterial on a semiconductor substrate can be shifted by the substrate doping. We further study the electrical tuning of metamaterial resonance via finite integral time-domain simulation.