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Characterization of zirconium oxynitride films obtained by radio frequency magnetron reactive sputtering
Abstract Thin ZrN x O y films are deposited on Si (100) substrates by radio frequency (RF) reactive magnetron sputtering of a zirconium target in an argon–oxygen–nitrogen mixture. The Φ N2 / Φ (Ar +Expand
Enhancement of sensitivity in gas chemiresistors based on carbon nanotube surface functionalized with noble metal (Au, Pt) nanoclusters
Multiwalled carbon nanotube (MWCNT) films have been fabricated by using plasma-enhanced chemical vapor deposition system onto Cr–Au patterned alumina substrates, provided with 3nm thick Fe growthExpand
A novel method for preparing and characterizing alcoholic EPD suspensions.
Ceramic suspensions composed of alumina and mixtures of alumina and zirconia powders in ethyl alcohol were prepared. A solution of citric acid and triethylamine was used as dispersant. The citricExpand
Synthesis and characterization of titanium and zirconium oxynitride coatings
Abstract Thin films of zirconium oxynitride (ZrNO) and titanium oxynitride (TiNO) have been deposited onto Si(100) substrates at room temperature by radiofrequency magnetron sputtering in anExpand
Role of iron catalyst particles density in the growth of forest-like carbon nanotubes
Abstract Carbon nanotubes (CNTs) were fabricated by Chemical Vapour Depositon using a C 2 H 2 /H 2 mixture. They were grown on Si/SiO 2 substrate with Fe film as catalyst, deposited using thermalExpand
Improved properties of TiAlN coatings through the multilayer structure
Abstract TiAlN/AlN multilayers are attracting great interest for the possibility to modulate their mechanical and tribological properties through the variation of multilayer design. In this workExpand
Sputtering deposition and characterization of zirconium nitride and oxynitride films
Abstract The interest about zirconium oxynitrides is growing with the attention for zirconium nitrides phase at high zirconium content. In recent years a great progress has been made to realize bothExpand
Effect of Fe catalyst thickness and C2H2/H2 flow rate ratio on the vertical alignment of carbon nanotubes grown by chemical vapour deposition
Abstract Carbon nanotubes (CNTs) were fabricated by Chemical Vapour Depositon using a C 2 H 2 /H 2 mixture. They were grown on Si/SiO 2 substrate with Fe film as catalyst, deposited using thermalExpand
Structural and optical modification in hafnium oxide thin films related to the momentum parameter transferred by ion beam assistance
Abstract Hafnium oxide (HfO2) films were deposited on silica and glass substrates by ion (Xe+) assisted deposition with increasing ion momentum transfer to the growing film. The relationship amongExpand
Effect of growth catalysts on gas sensitivity in carbon nanotube film based chemiresistive sensors
Multiwalled carbon nanotube (MWCNT) films have been deposited by using plasma enhanced chemical vapor deposition (PECVD) system onto Cr–Au patterned alumina substrates for NO2 and NH3 gas sensingExpand
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