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Chemical kinetics and energy transfer in moderate pressure H2 plasmas used in diamond MPACVD processes
A kinetic model for moderate-pressure microwave H2 plasmas obtained in diamond deposition reactors is presented. This model involves three groups of reactions which describe the vibrational kineticsExpand
Monte Carlo simulations of hydrogen storage in carbon nanotubes
The storage capacities of porous materials made up of carbon nanotubes are estimated by Monte Carlo simulations for the specific case of hydrogen in the pressure domain from 0.1 to 20 MPa atExpand
Photothermal examination of the heat diffusion inhomogeneity in diamond films of sub-micron thickness
Abstract We present measurements of the in-plane thermal diffusivity of free-standing diamond films of thicknesses from 0.3 to 6 μm. The photothermal method used for the measurements isExpand
High quality MPACVD diamond single crystal growth: high microwave power density regime
The growth of monocrystalline diamond films of electronic quality and large thickness (>few hundreds of microns) is an important issue in particular for high-power electronics. In this paper, we willExpand
Self-consistent microwave field and plasma discharge simulations for a moderate pressure hydrogen discharge reactor
A self-consistent two-dimensional model of the electromagnetic field and the plasma in a hydrogen discharge system has been developed and tested in comparison to experimental measurements. TheExpand
VALIDATION OF ACTINOMETRY FOR ESTIMATING RELATIVE HYDROGEN ATOM DENSITIES AND ELECTRON ENERGY EVOLUTION IN PLASMA ASSISTED DIAMOND DEPOSITION REACTORS
The validity of the actinometry method applied to H-atom mole fraction measurements has been analyzed. First, a theoretical approach allowed us to determine boundary conditions for which the validityExpand
Geometric modeling of homoepitaxial CVD diamond growth: I. The {1 0 0}{1 1 1}{1 1 0}{1 1 3} system
Abstract Plasma-assisted CVD homoepitaxial diamond growth is a process that must satisfy many stringent requirements to meet industrial applications, particularly in high-power electronics. PurityExpand
Interaction between the electromagnetic fields and the plasma in a microwave plasma reactor
We investigate the interaction between electromagnetic (EM) fields and a hydrogen plasma in a resonance-type microwave plasma reactor, by combining an elementary theoretical analysis and aExpand
Single crystal CVD diamond growth strategy by the use of a 3D geometrical model : Growth on (113) oriented substrates
The quality of single crystal diamond obtained by microwave CVD processes has been drastically improved in the last 5 years thanks to surface pretreatment of the substrates [A. Tallaire, J. Achard,Expand
High quality thick CVD diamond films homoepitaxially grown on (111)-oriented substrates
Abstract The development of diamond power electronic devices based on p–n junctions strongly relies on the ability to achieve efficient n-type doping which has so far been the limiting step.Expand
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