A.V. Korlyakov

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In this paper, mechanical sensitivity and deflection of center is compared with thin planar membrane, thin corrugated membrane and thin corrugated membrane with metal layer. All models have been developed by realizing the initial stress. Finite element model simulation results show that mechanical sensitivity of corrugated membrane with metal layer is less(More)
This paper presents some analytical findings of thermal investigations on silicon carbide and that-based devices with the view to the prospective change-over to a novel silicon carbide MEMS technology. A SiC-AlN composition is discussed as an attractive candidate for improving the thermal resistance and the reliability of microsystems for various purposes.(More)
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