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— We report a new approach for improvement of the long term in-run bias stability of Coriolis vibratory gyroscopes. The approach is based on utilization of the mechanical quadra-ture error in gyroscopes to compensate for variation in system parameters. The proposed approach was validated by a silicon Quadruple Mass Gyroscope, with the natural frequency of 3(More)
Detection of motion with parallel plate capacitors is commonly used in MEMS; small amplitude of motion is typically assumed. In this paper, we derive precise and constructive equations for the case of parallel plate capacitive detection of arbitrary amplitude of motion. These equations are solved in closed form without using a small displacement assumption.(More)
This paper analyzes energy dissipation mechanisms in vacuum-operated in-phase and anti-phase actuated micromachined z-axis vibratory gyroscopes. The type of actuation is experimentally identified as the key factor to energy dissipation. For in-phase devices, dissipation through the die substrate is the dominant energy loss mechanism. This damping mechanism(More)
We report vacuum packaging procedures for low-stress die attachment and versatile hermetic sealing of resonant MEMS. The developed in-house infrastructure allows for both high and moderate-level vacuum packaging addressing the requirements of various applications. Prototypes of 100 µm silicon-on-insulator Quadruple Mass Gyroscopes (QMGs) were packaged using(More)
Keywords: MEMS gyroscope Angle measuring Whole angle Rate integrating Quality factor Bandwidth a b s t r a c t We report detailed characterization of a vacuum sealed rate integrating silicon MEMS gyroscope. The new gyroscope utilizes geometrically symmetric, dynamically balanced quadruple mass architecture, which provides a combination of maximized quality(More)
201 INTRODUCTION Innovation projects are dealt with in a variety of areas that are studied separately (technical, technoo logical, organizational, economic ones, knowledge management) and employ various management mechanisms that are typical of these systems. This is why the theory and practice of innovation managee ment were previously developed by solving(More)
This paper studies a design approach that yields robust vibratory MEMS gyroscopes. The design is based on multiple drive-mode resonators with incrementally spaced frequencies, distributed symmetrically around the center of a supporting frame. These resonators are structurally constrained in the tangential direction with respect to the supporting frame. In(More)
We report high-Q and wide dynamic range MEMS gyroscopes and accelerometers for development of a very compact IMU capable of North finding and tracking over dynamic environment. The vacuum packaged SOI rate sensors utilize symmetric Quadruple Mass Gyroscope (QMG) architecture with measured quality factors of 1.2 million and proven sub– °/hr Allan deviation(More)
Our previous work demonstrated the advantages of MEMS vibratory gyroscopes with 1 degree of freedom (DOF) drive and 2-DOF sense modes which were shown to be robust to temperature drifts. These devices were designed with frequencies below 1 kHz; many applications, however, require gyroscopes with operational frequencies above 1 kHz for the rejection of(More)
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