A. M. Lohvynov

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The paper shows the results of the study structural-phase state and electrical properties of Ru nanocrystalline films. It was found that the film thickness and substrate temperature greatly affects on the crystal structure of these nanostructures. At thickness d <; 50 nm films were quasi amorphous structure regardless of the substrate temperature with(More)
The paper presents results of studying the structure and phase composition of Ru thin films and two- and three-layer film systems based on Ru i Co. It was established that the single-phase composition of thin-film samples Ru is observed at thicknesses Ru d<inf>Ru</inf> &#x2265; 40 nm corresponds to hcp- Ru with lattice parameters a<inf>Ru</inf> &#x003D;(More)
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