A. Llobera

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In this work optical properties of SiOX ð0 , X , 2Þ layers obtained by plasma enhanced chemical vapor deposition are studied. Infrared spectra and refractive index dependences with the reactant gases flow ratio R are explained for as deposited, aged and thermally treated samples in the R range from 9.17 to 110. Variations are found to be influenced mainly(More)
This contribution deals with the optimization of a new SU-8 optical accelerometer. Microaccelerometers became large-scale production devices the last 90's. Several working principles have been applied for acceleration sensing. However, most of them suffer from high cross-sensitivity to electromagnetic interferences (EMI) and they cannot be used under(More)
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