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—This work presents the implementation of planar Gunn diodes and pseudomorphic high electron mobility transistors (pHEMTs) on the same wafer for the first time. The AlGaAs/InGaAs/GaAs heterostructures were designed for the realisation of pHEMTs on a Gallium Arsenide-based wafer. T-gate technology has been used for the maximisation of the transistor(More)
a r t i c l e i n f o We present a new chlorine-free dry etching process which was used to successfully etch indium antimonide grown on gallium arsenide substrates while keeping the substrate temperature below 150 °C. By use of a reflowed photoresist mask a sidewall with 60 degree positive slope was achieved, whereas a nearly vertical one was obtained when(More)
This paper presents monolithic microwave integrated circuit (MMIC) resonant tunneling diode (RTD) oscillator with high performance: high power at high frequencies. The circuit topology employs two In0.53Ga0.47As/AlAs RTDs in parallel and each device is biased individually. These oscillators operate at 125GHz, 156GHz and 166 GHz with output power 0.34 mW,(More)
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