A. Khajepour

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The effect of flexibility and initial curvature of moving plates in parallel-plate MEMS capacitors are investigated. A parallel-plate-based MEMS tunable capacitor with extended tunability and linear capacitance-voltage (C-V) response is introduced. The design combines the flexibility and curvature of the electrode with an array of mechanical stoppers to(More)
A novel fishbone-shape parallel-plate-based capacitor with high tunability and linear C-V response is presented. The electrodes consist of a set of lateral cantilever beams of different lengths, attached to a longitudinal fixed-fixed beam. An insulating layer prevents contact between the electrodes. When a DC voltage is applied, the longitudinal and lateral(More)
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