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The present invention provides can be easily produced by a replica method, and a method of manufacturing an optical waveguide having an optical signal is easily leaked from inside the internal… Continue Reading
Above the silicon wafer (73) is provided a plurality of acoustic sensors (51). Using a silicon wafer (74), are integrally formed a plurality of interposer (52) having a cavity (70) or a through… Continue Reading
A method for manufacturing an optical waveguide apparatus, simplify the manufacturing process of the optical waveguide device suitable for mass production. The optical element provided for the… Continue Reading