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The present invention provides a substrate even in the case where the size of the well can be adsorbed onto the substrate while the substrate seating part, can be well adsorbed substrate processing… (More)
The present invention provides a substrate processing apparatus having a changing part to change the supporting way of the substrate. The changing part can suppress the length in the transporting… (More)
The invention provides an apparatus for applying a treating liquid, in which the treating liquid is prevented from being stuck to the area outside the area to be coated of a substrate while… (More)
An electrolyte membrane with a backsheet is sent out from an electrolyte membrane unwinding roller, and is separated with its second side sucked on a suction roller by a first press roller. While the… (More)
A substrate processing apparatus can be suppressed due to the increase in the maintenance time caused by intermittent. A substrate provided on the main body processing apparatus (1), (2) a plurality… (More)