• Publications
  • Influence
Effect of gas flow on the growth of In-rich AlInN films by metal-organic chemical vapor deposition
Indium-rich AlInN are grown by metal-organic (MO) chemical vapor deposition using trimethylaluminum, trimethylindium, and ammonia. Under the conservation of MO influx, the effects of gas flow in theExpand
  • 27
  • PDF