Author pages are created from data sourced from our academic publisher partnerships and public sources.
- Publications
- Influence
Effect of gas flow on the growth of In-rich AlInN films by metal-organic chemical vapor deposition
- T. Kang, Masatomo Yamamoto, +7 authors 山本 暠勇
- Chemistry
- 1 September 2009
Indium-rich AlInN are grown by metal-organic (MO) chemical vapor deposition using trimethylaluminum, trimethylindium, and ammonia. Under the conservation of MO influx, the effects of gas flow in the… Expand